|
The Keyence VK-X3050 3D Optical Profiler is a non-contact optical metrology system designed for high-resolution three-dimensional surface characterization. By combining laser confocal microscopy, focus variation, and white light interferometry, the system provides measurements of surface topography, step height, surface roughness, and feature dimensions without contacting or damaging the sample.
Capabilities
- High-resolution 2D and 3D surface imaging
- Surface topography and height mapping
- Step height and film thickness measurements
- Surface roughness analysis (Ra, Rq, Rz, and other standard roughness parameters)
- Line profile and cross-sectional measurements
- Area, volume, and feature dimension analysis
- Large-area surface mapping through image stitching
Measurement Methods
- Pinhole confocal optical system
- Focus variation optical system
- White light interferometry (WLI)
Optical Configuration
- Objectives:
- 5× (with ring illumination)
- 10× (with ring illumination)
- 20×
- 50×
- 150×
- 10× WLI objective with tilt stage
- Laser source: 661 nm red laser
- Optical zoom: Up to 8×
Automated Features
- Auto gain
- Auto focus
- Double-scan brightness optimization
- Automatic image stitching for large-area measurements
- Motorized stage with 360° sample rotation
|